Foundations of MEMS: Micro and Nanofabrication Techniques

The technology powering modern sensors, smartphones, and medical devices relies on structures smaller than a human hair. Understanding how these micro- and nanoscale systems are designed and manufactured is essential for the next generation of hardware engineering. This text-only course provides a comprehensive introduction to the foundational processes of microfabrication and nanofabrication. You will transition from understanding basic silicon properties to grasping the complex chemical and physical steps used to build functional Micro-Electro-Mechanical Systems (MEMS). In this course, you will learn to: 1. Understand the core terminology, history, and fundamental physics of MEMS and nanotechnology. 2. Explain the step-by-step processes of photolithography, deposition, and etching in a cleanroom environment. 3. Analyze the mechanical and electrical properties of silicon and alternative substrate materials. 4. Compare bulk and surface micromachining techniques for creating complex 3D microstructures. 5. Explore modern fabrication advancements, including nanoimprint lithography and high-aspect-ratio etching. 6. Evaluate cleanroom safety protocols, contamination control, and quality inspection methods. The course begins with foundational concepts of micro-scale physics and material science before guiding you through the chemical and physical processes used in modern cleanrooms. You will study real-world MEMS device structures, such as accelerometers and pressure sensors, to see how these fabrication steps come together in practice. Designed for engineering students, technicians, and curious professionals new to nanotechnology, this course requires no prior cleanroom experience. Start reading today to build a strong foundation in the world of micro and nanoscale engineering.